Precision mechatronics and nanotechnology communities can both benefit from a course centered around an Atomic Force Microscope (AFM). Developing an AFM can provide precision mechatronics engineers with a valuable multidisciplinary hands-on training experience. In return, such expertise can be applied to the design and implementation of new precision instruments, which helps nanotechnology researchers make new scientific discoveries. However, existing AFMs are not suitable for mechatronics education due to their different original design intentions. Therefore, we address this challenge by developing an AFM intended for precision mechatronics education.

This paper presents the design and implementation of an educational AFM and its corresponding precision mechatronics class. The modular educational AFM is low-cost ($\le \$$4,000) and easy to operate. The cost reduction is enabled by new subsystem development of a buzzer-actuated scanner and demodulation electronics designed to interface with a myRIO data acquisition system. Moreover, the use of an active cantilever probe with piezoresistive sensing and thermomechanical actuation significantly reduced experiment setup overhead with improved operational safety. In the end, the developed AFM capabilities are demonstrated with imaging results. The paper also showcases the course design centered around selected subsystems. The new AFM design allows scientific-method-based learning, maximizes utilization of existing resources, and offers potential subsystem upgrades for high-end research applications. The presented instrument and course can help connect members of both the AFM and the mechatronics communities to further develop advanced techniques for new applications.

精密机电一体化和纳米技术界都可以从以原子力显微镜（AFM）为中心的课程中受益。开发AFM可以为精密机电工程师提供宝贵的多学科动手培训经验。作为回报，这些专业知识可以应用于新的精密仪器的设计和实施，这有助于纳米技术研究人员做出新的科学发现。但是，由于现有的AFM具有不同的原始设计意图，因此不适合机电一体化教育。因此，我们通过开发用于精密机电一体化教育的AFM来应对这一挑战。

本文介绍了教育性AFM及其相应的精密机电一体化课程的设计和实现。模块化教育性AFM价格低廉（$\le \$$4,000），并且易于操作。蜂鸣器驱动的扫描仪和解调电子设备的新子系统开发可降低成本，该电子设备设计为与myRIO数据采集系统接口。此外，使用具有压阻感测和热机械致动的有源悬臂探针可显着减少实验设置开销，并提高操作安全性。最后，通过成像结果展示了已开发的AFM功能。本文还展示了围绕所选子系统的课程设计。新的AFM设计允许基于科学方法的学习，最大程度地利用现有资源，并为高端研究应用程序提供潜在的子系统升级。