Cold atmospheric-pressure plasma (CAP) has been shown to kill bacteria and remove biofilms. Here, we report the development of a unique CAP array device consisting of a parallel stack of eight linear-discharge plasma elements that create a $\sim 5$ -cm $^{\mathbf {2}}$ (2.4 cm $\times 2$ cm) treatment area. The CAP device is fabricated from low-temperature cofired ceramic (LTCC) layers to create 24-mm-long linear-discharge channels (500- $\mu \text{m}$ gap) with embedded opposing silver metal electrodes. A 20-kHz ac voltage (0.5–5 kV) applied to the electrodes generates an Ar/ $\text{O}_{\mathbf {2}}$ plasma between the plates, with the gas flow directing the reactive species toward the biological sample (biofilms and so on) to affect the antimicrobial treatment. External ballast resistors were used to study discharge uniformity in the stacked array elements, and internal thick film ballast resistors ( $\approx 150~\text{k}\Omega $ ) were developed to create a fully integrated device. Typical element discharge currents were 1–2.5 mA with the total array current tested at 20 mA to provide optimal device uniformity. The plasma discharge was further shown to produce reactive hydrogen peroxide and exert antimicrobial effects on Pseudomonas biofilms and Salmonella contaminated eggshell samples, with >99% of the bacterial cells killed with less than 60 s of plasma exposure.

中文翻译：

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多放电冷大气压等离子体阵列的制造和性能

冷大气压等离子体 (CAP) 已被证明可以杀死细菌并去除生物膜。在这里，我们报告了一种独特的 CAP 阵列设备的开发，该设备由八个线性放电等离子体元件的平行堆叠组成，这些元件产生了一个 $\sim 5$ -厘米 $^{\mathbf {2}}$（2.4 厘米 $\乘以 2$cm) 治疗区域。CAP 器件由低温共烧陶瓷 (LTCC) 层制成，以创建 24 毫米长的线性放电通道（500- $\mu \text{m}$间隙）具有嵌入的相对银金属电极。施加到电极上的 20 kHz 交流电压 (0.5–5 kV) 会产生 Ar/ $\text{O}_{\mathbf {2}}$板之间的等离子体，气流将活性物质导向生物样品（生物膜等）以影响抗菌处理。外部镇流电阻用于研究堆叠阵列元件的放电均匀性，内部厚膜镇流电阻（ $\约 150~\text{k}\Omega $ ) 被开发来创建一个完全集成的设备。典型的元件放电电流为 1-2.5 mA，测试的总阵列电流为 20 mA，以提供最佳的器件均匀性。等离子体放电进一步显示出产生活性过氧化氢并发挥抗菌作用假单胞菌属生物膜和沙门氏菌受污染的蛋壳样本，超过 99% 的细菌细胞在少于 60 秒的血浆暴露时间内被杀死。