The integration of two-dimensional (2D) van der Waals semiconductors into silicon electronics technology will require the production of large-scale, uniform, and highly crystalline films. We report a route for synthesizing wafer-scale single-crystalline 2H molybdenum ditelluride (MoTe₂) semiconductors on an amorphous insulating substrate. In-plane 2D-epitaxy growth by tellurizing was triggered from a deliberately implanted single seed crystal. The resulting single-crystalline film completely covered a 2.5-centimeter wafer with excellent uniformity. The 2H MoTe₂ 2D single-crystalline film can use itself as a template for further rapid epitaxy in a vertical manner. Transistor arrays fabricated with the as-prepared 2H MoTe₂ single crystals exhibited high electrical performance, with excellent uniformity and 100% device yield.

将二维（2D）范德华半导体集成到硅电子技术中将需要生产大规模，均匀且高度结晶的薄膜。我们报告了在非晶绝缘衬底上合成晶片级单晶2H二碲化钼（MoTe ₂）半导体的途径。故意植入的单个晶种触发了通过碲化的平面2D外延生长。所得的单晶膜以优异的均匀性完全覆盖了2.5厘米的晶片。2H MoTe ₂ 2D单晶膜可以将其自身用作模板，以垂直方式进一步快速外延。使用准备好的2H MoTe ₂制成的晶体管阵列 单晶具有较高的电性能，具有出色的均匀性和100％的器件良率。