The beam optics in a nuclear microprobe is considered on the basis of quality criteria for focusing systems. In this consideration, empirical criteria with dominant chromatic or intrinsic spherical aberrations are used. In a more general criterion, where all aberrations can be taken into account, the maximum acceptance for a fixed beam spot size on the target is used. Another criterion, that is closest to an experiment, is based on the condition of the minimum spot size at a fixed beam current and takes into account the nonuniform distribution of ions in the phase volume. This review summarizes the studies of various types of quadrupole focusing systems and implies the need for further development of the nuclear microprobe by using aberration correctors and a compact system. The analysis of the influence of various aberrations on the resolution of a nuclear microprobe is conducted with special attention paid to the positioning aberrations in separated quadrupole probe-forming systems. It is demonstrated why integrated multiplets of quadrupole lenses are preferred in such systems. Methods to process experimental results for an adequate determination of the spot size on the target are considered.

核微探针中的光束光学系统是根据聚焦系统的质量标准来考虑的。考虑到这一点，使用具有主要色差或固有球差的经验标准。在更一般的标准中，可以考虑所有像差，使用目标上固定束斑尺寸的最大接受度。另一个最接近实验的标准是基于固定束电流下最小光斑尺寸的条件，并考虑了相体积中离子的不均匀分布。这篇综述总结了各种类型的四极聚焦系统的研究，并暗示需要通过使用像差校正器和紧凑型系统来进一步开发核微探针。进行各种像差对核微探针分辨率的影响的分析时，要特别注意分离的四极杆探针形成系统中的定位像差。证明了为什么在这样的系统中首选四极透镜的集成多重透镜。考虑了处理实验结果以适当确定目标点尺寸的方法。