Acoustic/ultrasonic sensors are devices that can convert mechanical energy into electrical signals. The Fabry–Perot cavity is processed on the end face of the double-clad fiber by a two-photon three-dimensional lithography machine. In this study, the outer diameter of the core cladding was 250 μm, the diameter of the core was 9 μm, and the microcavity sensing unit was only 30 μm. It could measure ultrasonic signals with high precision. The characteristics of the proposed ultrasonic sensor were investigated, and its feasibility was proven through experiments. Its design has a small size and can replace a larger ultrasonic detector device for photoacoustic signal detection. The sensor is applicable to the field of biomedical information technology, including medical diagnosis, photoacoustic endoscopy, and photoacoustic imaging.

中文翻译：

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基于法布里-珀罗腔传感器的超声波信号检测

声学/超声波传感器是可以将机械能转换成电信号的装置。采用双光子三维光刻机在双包层光纤端面加工法布里-珀罗腔。本研究中，纤芯包层外径为250μm，纤芯直径为9μm，微腔传感单元仅为30μm。它可以高精度地测量超声波信号。研究了所提出的超声波传感器的特性，并通过实验证明了其可行性。其设计尺寸较小，可以替代较大的超声波检测装置进行光声信号检测。该传感器适用于医学诊断、光声内窥镜、光声成像等生物医学信息技术领域。