This paper reports a precision mode-localized accelerometer operating in a higher-order flexural mode. The accelerometer consists of two symmetric resonators coupled by a central rigid coupler to generate an ultra-weak coupling factor. A reduced noise floor is observed when the resonators operate in the higher-order flexural mode compared to the basic lower-order mode. The mode-localized accelerometer working in the fifth-order mode demonstrates an input-referred bias instability of 130 ng and noise floor of 85 ng/ $\surd $ Hz, which are the best results obtained for accelerometers employing the mode localization paradigm to date. These results indicate that the performance of the mode-localized sensors can be improved by operating at a higher working frequency if the coupling factor and quality factor do not drop significantly. [2020-0365]

中文翻译：

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低噪声高阶模式定位MEMS加速度计

本文报告了一种在高阶弯曲模式下运行的精确模式局部加速度计。加速度计由两个对称谐振器组成，这些谐振器由中央刚性耦合器耦合以产生超弱耦合因子。与基本低阶模式相比，当谐振器以高阶挠曲模式工作时，观察到降低的本底噪声。在五阶模式下工作的模式本地化加速度计显示出130 ng的输入参考偏置不稳定性和85 ng / n的本底噪声 $ \ surd $ Hz，这是迄今为止采用模式定位范例的加速度计的最佳结果。这些结果表明，如果耦合因子和品质因子没有显着下降，则可以通过以较高的工作频率进行操作来提高模式定位传感器的性能。[2020-0365]