This study proposes a highly stable differential resonant accelerometer that is monolithically micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of quartz accelerometer is centrally symmetrical, which comprises two double-ended tuning forks (DETFs), two link beams, two micro-leverages, a proof mass, and a quartz frame. Micro-leverages and DETFs are perpendicular to each other and are located around the chip, which maximizes the utilization of the sensor area and is conducive to the miniaturization of the sensor. The effectiveness of the structure was verified by theoretical analysis, simulation, and experiment. The structure with differential arrangement can eliminate common mode disturbances, such as temperature, to improve sensitivity to acceleration. Within the measurement range of ±100 g, the sensor’s sensitivity, which is measured by experiments, is 17.72 Hz/g, with a velocity random walk of $0.84~\mu \text{g}/\surd $ Hz and bias instability of $3.05~\mu \text{g}$ , which is consistent with the theoretical analysis results. [2020-0309]

中文翻译：

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具有微杠杆作用的高稳定性石英谐振加速度计

这项研究提出了一种高度稳定的差分共振加速度计，该加速度计是由一块超纯的单Z形切割石英晶体单片微加工而成的。石英加速度计的整体结构是中心对称的，它包括两个双端音叉（DETF），两个链接梁，两个微杠杆，一个质量块和一个石英框架。微杠杆和DETF相互垂直，并位于芯片周围，从而最大程度地利用了传感器区域，有利于传感器的小型化。通过理论分析，仿真和实验验证了该结构的有效性。具有差动排列的结构可以消除共模干扰，例如温度，以提高对加速度的敏感性。在±100 g的测量范围内， $ 0.84〜\ mu \ text {g} / \ surd $ Hz和偏置不稳定性 $ 3.05〜\ mu \ text {g} $ ，与理论分析结果相符。[2020-0309]