This work presents a long-term characterization of a newly designed microelectromechanical-system (MEMS) micromirror capable of achieving a field-of-view (FOV) of almost 94°. The process used to fabricate the device allows to combine piezoelectric (PZT) actuation and piezoresistive (PZR) sensing of the tilt angle, enabling testing under closed loop control. Consistently with the adopted design guidelines, which considered fatigue limits on the silicon springs, the tested devices are able to withstand up to 3.6 billion continuous operating cycles in an uncontrolled laboratory environment when operated in resonant mode at 500 Hz. [2020-0366]

中文翻译：

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具有PZT驱动和PZR传感功能的新型广角微镜的长期表征

这项工作提出了一种新设计的微机电系统（MEMS）微镜的长期特性，该微镜能够实现近94°的视场（FOV）。用于制造该器件的过程允许将压电（PZT）致动和压阻（PZR）感测相结合，从而实现在闭环控制下的测试。与考虑到硅弹簧疲劳极限的已采用设计准则一致，在500 Hz的共振模式下，在不受控制的实验室环境中，被测试的设备能够承受高达36亿个连续操作周期。[2020-0366]