In this paper, electret based vibration energy harvesters are designed and fabricated with perforated electrode based on MEMS technology. Through-holes are distributed on the fixed electrode in the device to optimize the energy harvesting process. The effect of the holes on the output power of the device are analyzed and discussed both in the finite element method (FEM) simulation and the experiments. It can be noticed that the through-holes can effectively lower the squeeze-film air damping force on the moveable proof mass at the atmosphere. Therefore, the energy loss due to the air damping could be reduced, and the output power of the device increases. The effects of the hole diameter and numbers on the output power of our device are also investigated in detail. By optimizing the configuration of the holes, the perforated device with the hole diameter of $400~\mu \text{m}$ and depth of $100~\mu \text{m}$ exhibits the highest power output at the low acceleration of 1.84 m/s ² , which proves promising application for self-powered electronics in the future. [2020-0380]

中文翻译：

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带孔电极的MEMS振动能量采集器的优化

在本文中，基于MEMS技术的带孔电极设计并制造了基于驻极体的振动能量收集器。通孔分布在设备中的固定电极上，以优化能量收集过程。在有限元方法（FEM）模拟和实验中都分析和讨论了孔对器件输出功率的影响。可以注意到，通孔可以有效地降低在大气中对可移动检验质量块的挤压膜空气阻尼力。因此，可以减少由于空气阻尼引起的能量损失，并且装置的输出功率增加。还详细研究了孔径和数量对我们设备输出功率的影响。通过优化孔的配置， $ 400〜\ mu \ text {m} $ 和深度 $ 100〜\ mu \ text {m} $ 在1.84 m / s ²的低加速度下具有最高的功率输出 ，这证明了将来在自供电电子设备中的应用前景广阔。[2020-0380]