Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.

中文翻译：

---

扫描电子显微镜中的光束整形和探针表征

在这里，我们演示了使用纳米光栅全息图在扫描电子显微镜中衍射和整形电子。衍射光栅放置在柱中的孔中。整个衍射图样可以穿过物镜并投射到样本上，或者可以使用中间孔来选择特定的衍射光束。我们讨论了几种表征衍射图样的技术。光栅设计可以包含可能影响衍射SEM探针的相位和强度的特征。我们通过产生电子涡旋束来证明这一点。