In this study, a novel dynamic contour error compensation technique has been proposed for the elliptical vibration cutting process achieved through the ultra-precision amplitude control. The influence of the contour error, triggered due to the inertial vibrations of the friction-less feed drive system, on the machining accuracy deterioration has been experimentally investigated. In order to reduce the contour error, a compensation method utilizing a real-time amplitude control in the elliptical vibration cutting process has been applied. In the proposed method, the dynamic motion error along the depth of cut direction is detected by utilizing the precise linear encoders installed on the feed drive system. The motion error in real-time is subsequently converted into cancelling amplitude command for the vibration control system of the ultrasonic vibrator, thus, guaranteeing that the envelope of the vibration amplitudes auto-tracks the dynamic reference position of the motion axis in the depth of cut direction. Due to this, a constant nominal depth of cut can be obtained even though the inertial vibrations disturb the feed drive control during machining. A series of experimental investigations have been conducted in order to analyze the machining performance by employing the proposed method. The maximum machining error is observed to significantly decrease from 0.6 to 0.04 μm by applying the proposed compensation method. Finally, the micro dimple array with a structural height from about 200 to 600 nm could be accurately fabricated with a maximum machining error of 36.8 nm, which verified the feasibility of the proposed amplitude control compensation method.

在这项研究中，提出了一种新颖的动态轮廓误差补偿技术，用于通过超精密振幅控制实现的椭圆振动切削过程。实验研究了由于无摩擦进给驱动系统的惯性振动而引起的轮廓误差对加工精度下降的影响。为了减小轮廓误差，已经应用了在椭圆振动切割过程中利用实时幅度控制的补偿方法。在提出的方法中，通过使用安装在进给驱动系统上的精密线性编码器来​​检测沿切割方向深度的动态运动误差。实时的运动误差随后被转换为用于超声振动器的振动控制系统的抵消幅度命令，从而确保了振动幅度的包络会自动跟踪运动轴在切削深度中的动态参考位置方向。因此，即使在加工过程中惯性振动干扰进给驱动控制，也可以获得恒定的名义切削深度。为了采用所提出的方法来分析加工性能，已经进行了一系列实验研究。通过采用建议的补偿方法，可以观察到最大加工误差从0.6减小到0.04μm。最后，