In this study, ZnO nanoplatelets (NPs) grown on the SiO₂ layer using mist chemical vapor deposition (mist-CVD) growth method were investigated for different growth temperatures. Structural and surface properties of the grown ZnO NPs have been characterized by x-ray diffraction (XRD), atomic force microscopy (AFM), and scanning electron microscopy (SEM) measurements. ZnO NPs have preferred to grow in the $[10\bar{1}2]$ and $[11\bar{2}0$] growing directions with two-dimensional (2D) nanosheet like behavior. Furthermore, it is observed from XRD results that possible beta phase willemite (Zn₂SiO₄) structure has been grown for the first time using mist-CVD method. It is shown that the higher growth temperature is decreasing the growth rate of ZnO NPs on the substrate where the Leidenfrost effect is seemed to occur. The characteristic vibration modes related to wurtzite ZnO have been shown together with confocal Raman spectroscopy measurement.

在这项研究中，ZnO纳米片（NPs）在SiO ₂层上使用薄雾化学气相沉积（mist-CVD）生长方法进行了研究，研究了不同的生长温度。通过X射线衍射（XRD），原子力显微镜（AFM）和扫描电子显微镜（SEM）测量来表征生长的ZnO NP的结构和表面特性。ZnO NPs优先生长在$[10\stackrel{〜}{\mathrm{1个}}\mathrm{2个}]$ 和 $[11\stackrel{〜}{\mathrm{2个}}0$]具有二维（2D）纳米片状行为的生长方向。此外，从XRD结果观察到，可能的β相硅铝石（Zn ₂ SiO ₄）结构已经首次使用薄雾CVD法生长。结果表明，较高的生长温度降低了似乎出现莱顿弗罗斯特效应的基底上ZnO NPs的生长速率。与纤锌矿型ZnO有关的特征振动模式已与共焦拉曼光谱测量一起显示。