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PCB mounted sensor with high sensitivity SWNT-Based devices for gas sensing applications
Microelectronics Journal ( IF 2.2 ) Pub Date : 2021-03-31 , DOI: 10.1016/j.mejo.2021.105043
Narendra Kumar , Naveen Kumar Navani , Sanjeev Kumar Manhas

In this paper, the fabrication of aligned semiconducting single-walled carbon nanotube (SWNT) devices on a thermally grown silicon dioxide (SiO2) over silicon (Si) substrate is presented. The SWNTs are aligned between the nickel fingers that are patterned on the substrate. Subsequently, the fabricated devices are bonded onto a low-cost printed circuit board (PCB) with wire bonder. The mounted sensors have been tested for carbon dioxide (CO2) gas, acetone, and isopropyl alcohol (IPA) vapor sensing at room temperature. The sensitivity values of 27% for the concentration of 15000 ​ppm of CO2, 52% for the concentration of 7000 ​ppm of acetone, and 67% for the concentration of 900 ​ppm of IPA have been observed with good response and recovery times. The fabricated sensors show better performance than the already reported sensors.



中文翻译:

具有高灵敏度基于SWNT的设备的PCB安装传感器,用于气体传感应用

在本文中,提出了在硅(Si)衬底上热生长的二氧化硅(SiO 2)上制造对准的半导体单壁碳纳米管(SWNT)器件的方法。将SWNT对准在基板上构图的镍指之间。随后,用引线键合机将制作好的器件粘合到低成本印刷电路板(PCB)上。已安装的传感器已在室温下进行了二氧化碳(CO 2)气体,丙酮和异丙醇(IPA)蒸汽感测的测试。对于15000 ppm CO 2浓度,灵敏度值为27%观察到7000 ppm丙酮浓度为52%,IPA 900 ppm浓度为67%,具有良好的响应和恢复时间。制成的传感器显示出比已报告的传感器更好的性能。

更新日期:2021-04-06
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