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Direct correlation of local fluence to single-pulse ultrashort laser ablated morphology
Communications Materials Pub Date : 2021-03-29 , DOI: 10.1038/s43246-021-00138-x
Haruyuki Sakurai , Kuniaki Konishi , Hiroharu Tamaru , Junji Yumoto , Makoto Kuwata-Gonokami

Basic studies on ultrafast laser ablation processes are important for expanding their utility. In particular, understanding the ablated morphology in relation to the incident pulse is critical for micromachining, and an important benchmark for simulations. However, current morphological analyses rely on vast simplifications of experimental conditions, such as a singular fluence value to reduce a unique beam profile, or the maximum crater depth or diameter to describe the ablated morphology. Here, we develop a morphology analysis method in which we take the full two-dimensional information of both the input beam profile and the ablated morphology, and spatially correlate the two without data reduction. We show, using sapphire as a benchmark material, that this serves as a robust way to extract well-studied values and dependencies, such as the ablation threshold, and also as a way to probe the spatial independence of the process. We anticipate that our findings will modernize current study techniques to meet the demand for increased, high-quality data such as that required for artificial intelligence-based analysis.



中文翻译:

局部能量密度与单脉冲超短激光烧蚀形态的直接相关

超快激光烧蚀工艺的基础研究对于扩大其实用性很重要。尤其是,了解与入射脉冲有关的烧蚀形态对于微加工至关重要,也是进行仿真的重要基准。但是,当前的形态学分析依赖于实验条件的极大简化,例如使用单一的注量值来减小唯一的光束轮廓,或者使用最大的陷坑深度或直径来描述烧蚀的形态。在这里,我们开发了一种形态学分析方法,其中我们可以获取输入光束轮廓和烧蚀形态的全部二维信息,并在不减少数据的情况下将二者在空间上相关联。我们展示了使用蓝宝石作为基准材料,这是提取经过深入研究的值和依存关系的可靠方法,例如消融阈值,也可以作为探查过程空间独立性的一种方法。我们希望我们的发现将使当前的研究技术现代化,以满足对增加的高质量数据(如基于人工智能的分析所需的数据)的需求。

更新日期:2021-03-29
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