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Refractory Equipment for Firing Aluminum Nitride Substrates
Refractories and Industrial Ceramics ( IF 0.4 ) Pub Date : 2021-03-29 , DOI: 10.1007/s11148-021-00508-5
Yu. K. Nepochatov , P. M. Pletnev , A. A. Denisova

This article describes the process of firing aluminum nitride substrates, which is a process that occurs under its characteristic conditions: high temperatures of over 1800°C and a reducing environment. This article also presents the fact that high quality substrates having desirable properties such as high thermal conductivity and parallelism between layers can be achieved. This article also describes how optimal firing modes can be established using a special sagger design based on boron nitride. The designed sagger is a container that consists of a body, which is a rectangular box; a bottom; and plane–parallel separating plates with supports. To create a local (inside the sagger) clean recovery medium, mortise and tenon joints that interlock are provided between the body and bottom and the interlocks are filled with a heat-resistant inert powder.



中文翻译:

氮化铝基板的耐火设备

本文介绍了焙烧氮化铝基板的过程,该过程是在其特殊条件下发生的:超过1800°C的高温和还原性环境。该文章还提出了这样的事实,即可以实现具有所需特性(如高导热率和层间平行度)的高质量基板。本文还介绍了如何使用基于氮化硼的特殊刀形设计来建立最佳烧成模式。设计的匕首是一个由主体组成的容器,主体是一个矩形盒子。底部 以及带有支撑的平面平行隔板。要创建本地的(干净的内部)干净恢复介质,

更新日期:2021-03-29
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