Limited by the field of view of the computer-generated hologram (CGH), full-aperture measurement of long cylindrical mirror with large curvature have been challenging. This paper reports a stitching interferometry based on sub-aperture adjustment with an aberration model represented by 2D Chebyshev polynomials. Firstly, a mathematical model under null measurement between the sub-aperture adjustment and its corresponding aberration is established by combining 2-D Chebyshev polynomials, which can correct sub-aperture position deviation. Secondly, on the basis of the adjustment aberration model, a global stitching algorithm based on the self-residual iterative algorithm (SRIA) is proposed. The algorithm uses the global stitching matrix and the sub-aperture spatial position constraint of the adjustment aberration model to iterate repeatedly for sub-aperture position. The experimental results verify the validity and feasibility of the proposed method. Finally, compared with full-aperture measurements using CGH, the proposed stitching method can obtain high-precision smooth stitching surface, and the repeatability is better than 0.7 nm RMS (P-V).

受计算机生成的全息图（CGH）视场的限制，具有大曲率的长圆柱镜的全光圈测量一直是一项挑战。本文报告了一种基于子孔径调整的拼接干涉测量方法，并采用以2D Chebyshev多项式表示的像差模型。首先，结合二维切比雪夫多项式，建立了可校正子孔径位置偏差的子孔径调整及其对应像差之间零测量的数学模型。其次，在调整像差模型的基础上，提出了一种基于自残差迭代算法的全局拼接算法。该算法使用全局缝合矩阵和调整像差模型的子孔径空间位置约束来重复迭代子孔径位置。实验结果验证了该方法的有效性和可行性。最后，与使用CGH进行全口径测量相比，所提出的缝合方法可以获得高精度的平滑缝合表面，并且重复性优于0.7 nm RMS（PV）。