A new metrological atomic force microscope (MAFM) with combined deflection detection system that comprises a homodyne interferometer and an optical beam deflection measuring system are presented. The combination allows the simultaneous three-dimensional detection of position, bending and torsion of the cantilever. Two wedge plates with a wedge angle of 0.5 have been integrated to reduce the disturbing interferences. The new measuring system uses two tiltable plane mirrors and a shiftable focus lens to adjust the direction of the focused laser beam and the position of the focus. The integration of the MAFM head in a nanomeasuring machine (NMM-1) creates the possibility of traceable dimensional measurements over a large range of 25 mmנ25 mmנ5 mm with sub-nanometre resolution. This paper introduces its setup, realisation and metrological properties, such as stability of the characteristic curves, noise level and combined measurement uncertainty. Finally, exemplary measurement results are presented.

提出了一种新的计量原子力显微镜 (MAFM)，它具有组合偏转检测系统，该系统包括零差干涉仪和光束偏转测量系统。这种组合允许同时对悬臂的位置、弯曲和扭转进行三维检测。集成了两个楔角为 0.5 的楔形板，以减少干扰干扰。新的测量系统使用两个可倾斜的平面镜和一个可移动的聚焦透镜来调整聚焦激光束的方向和焦点的位置。将 MAFM 头集成到纳米测量机 (NMM-1) 中，可以在 25 毫米、25 毫米、5 毫米的大范围内以亚纳米分辨率进行可追溯的尺寸测量。本文介绍了它的设置、实现和计量特性，例如特性曲线的稳定性、噪声水平和组合测量不确定度。最后，给出了示例性测量结果。