Cutting force measurement is important for monitoring the diamond cutting process. In this paper, a new measurement method of thrust cutting force associated with a voice coil motor (VCM) driven fast tool servo (FTS) system has been developed. Instead of integrating additional force sensors to the FTS which would influence the dynamics of the FTS, the force measurement in the proposed system is achieved associated with in-process monitoring the variation of the driving current of the VCM and pre-process determining the system parameters. In this way, the cutting forces are accurately obtained by subtracting the influences of the driving force, the spring force, the damping force and the inertial force associated with the system as well as the cutting process. Based on the proposed method, a microstructure array was machined using the developed VCM-FTS and the cutting force during the machining process was monitored in real time. The measured force signal was in good agreement with the machining result. The surface profile error of the fabricated microstructure could be clearly distinguished by the variation of the measured cutting force signal. This provides a new approach for in-process cutting force measurement associated with FTS based diamond cutting process.

切削力的测量对于监控金刚石切削过程很重要。本文开发了一种与音圈电机（VCM）驱动的快速工具伺服（FTS）系统相关的推力切削力的新测量方法。与其在FTS上集成附加的力传感器，而不会影响FTS的动态性，而是在过程中监控VCM驱动电流的变化并进行预处理以确定系统参数，从而实现了所提出系统中的力测量。以这种方式，通过减去与系统以及切割过程相关的驱动力，弹簧力，阻尼力和惯性力的影响，可以精确地获得切割力。根据提出的方法，使用开发的VCM-FTS对微结构阵列进行加工，并实时监控加工过程中的切削力。测得的力信号与加工结果吻合良好。通过测量的切削力信号的变化可以清楚地区分所制造的微结构的表面轮廓误差。这为与基于FTS的金刚石切割工艺相关的过程中切割力测量提供了一种新方法。