This letter presents a high performance rate-integrating honeycomb disk resonator gyroscope (HDRG). High Q factor resonator and symmetric vibration detection gain are the key to high performance rate-integrating gyroscope. By stiffness-mass decoupling design, HDRG can achieve high Q factor of about 600k and decay time of over 44s. A compensation method is applied to suppress the rate-dependent angular drift caused by the asymmetry circular distribution of detection gains. Finally, the rate-integrating HDRG shows an excellent bias instability of 0.038°/h, 1.05ppm scale factor nonlinearity, wide measurement range of over ±7000°/s and a threshold value of about ±0.0001°/s, which is the best performance in the reported rate-integrating MEMS gyroscopes.

中文翻译：

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具有0.038°/ h偏置不稳定性和°7000°/ s测量范围的速率积分蜂窝圆盘谐振陀螺仪

这封信提出了一种高性能的速率积分蜂窝式磁盘谐振器陀螺仪（HDRG）。高Q因子谐振器和对称振动检测增益是高性能速率积分陀螺仪的关键。通过刚度-质量去耦设计，HDRG可以实现约600k的高Q因子和超过44s的衰减时间。应用补偿方法来抑制由检测增益的不对称圆形分布引起的速率相关的角漂移。最后，速率积分的HDRG表现出出色的偏置不稳定性，为0.038°/ h，比例因子非线性为1.05ppm，测量范围超过±7000°/ s，阈值约为±0.0001°/ s，这是最好的报告的速率积分MEMS陀螺仪的性能。