Phase resolved optical emission spectroscopy (PROES) measurements were combined with measurements of the optical emission intensity (OEI) and electrical characteristics (RF current and voltage, power, and DC bias voltage) as a function of time during the re-ignition of Ar plasmas pulsed at 100 Hz and 10 kHz. The OEI exhibits a large overshoot at the 100 Hz pulsing rate even though no such overshoot is present in any of the electrical characteristics. The OEI overshoot occurs at a point in time when the RF power, voltage, DC bias voltage, and electron density are all smaller than they become later in the glow. PROES measurements in combination with the time resolved electrical characteristics indicate that the heating mechanism for the electrons changes during the time of the overshoot in the OEI from stochastic heating to a combination of stochastic and ohmic heating. This combination appears to enable a more efficient transfer of the electrical energy into the electrons.

中文翻译：

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脉冲电容耦合Ar等离子体重燃期间的光发射强度超调和电子加热机制

在Ar等离子体重燃期间，将相分辨光发射光谱（PROES）测量与光发射强度（OEI）和电特性（RF电流和电压，功率以及DC偏置电压）的测量结果相结合脉冲频率为100 Hz和10 kHz。即使在任何电气特性中都没有这种过冲，OEI在100 Hz脉冲速率下仍显示出较大的过冲。OEI过冲发生在RF功率，电压，DC偏置电压和电子密度都小于其在辉光后期变小的时间点。PROES测量值与时间分辨的电特性相结合表明，在OEI的过冲期间，电子的加热机制会从随机加热变为随机加热和欧姆加热的组合。这种结合看来使得能够更有效地将电能转移到电子中。