Accurate secondary ion mass spectroscopy measurement of nitrogen in niobium relies on the use of closely equivalent standards, made by ion implantation, to convert nitrogen signal intensity to nitrogen content by determination of relative sensitivity factors (RSFs). Accurate RSF values for ppm-range nitrogen contents are increasingly critical, as more precision is sought in processes for next-generation superconducting radiofrequency (SRF) accelerator cavities. Factors influencing RSF value measurements were investigated with the aim of reliably attaining better than 10% accuracy in nitrogen concentrations at various depths into the bulk. This has been accomplished for materials typical of SRF cavities at the cost of increased attention to all aspects.

中文翻译：

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氮掺杂铌的二次离子质谱研究进展

铌中氮的准确二次离子质谱法测量依赖于通过离子注入制得的近似等效标准，通过确定相对灵敏度因子（RSF）将氮信号强度转换为氮含量。在下一代超导射频（SRF）加速器腔体的工艺中寻求更高的精度时，ppm级氮含量的准确RSF值变得越来越重要。研究了影响RSF值测量的因素，目的是可靠地在进入容器各个深度的氮浓度中获得优于10％的准确度。对于SRF腔体的典型材料，已经实现了这一点，但是却增加了对所有方面的关注。