Frequency-modulated continuous-wave (FMCW) interference, as a new technology of laser interferometry, has the advantages of length traceability, large range, high accuracy, simple structure, and optical fiber transmission. Based on the formula of FMCW laser interference displacement, a zero-crossing phase detection algorithm is proposed, which can accurately calculate the initial phase of a cosine signal in a modulation period, and it is successfully applied to the contact laser interference displacement sensor. The experimental results show that the FMCW technology based on the zero-crossing phase detection algorithm can achieve the technical specifications of the contact displacement sensor with a measurement range greater than 15 mm and the standard deviation is less than 0.01 μm. The conversion of noncontact measurement to contact measurement can realize the direct measurement of workpieces with complex surface conditions on the production line, breaking through the limitation of optical measurement and expanding the application of optical fiber interferometry.

中文翻译：

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零交叉相位检测算法在调频连续波位移传感器中的应用研究

调频连续波（FMCW）干扰作为激光干涉测量的一种新技术，具有长度可追溯，范围大，精度高，结构简单和光纤传输等优点。基于FMCW激光干涉位移的公式，提出了一种零交叉相位检测算法，该算法可以精确计算调制周期内余弦信号的初始相位，并成功应用于接触激光干涉位移传感器。实验结果表明，基于零交叉相位检测算法的FMCW技术可以达到接触位移传感器的技术指标，其测量范围大于15 mm，标准偏差小于 0.01μ。米 从非接触式测量到接触式测量的转换，可以实现对生产线上表面条件复杂的工件的直接测量，突破了光学测量的局限性，扩大了光纤干涉仪的应用范围。