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Electron collision cross section set for N2 and electron transport in N2, N2/He, and N2/Ar
Plasma Sources Science and Technology ( IF 3.3 ) Pub Date : 2021-03-17 , DOI: 10.1088/1361-6595/abe1d4
S Kawaguchi 1, 2 , K Takahashi 2 , K Satoh 2
Affiliation  

Electron collision cross section set for N2 is proposed. The proposed set consists of vibrational elastic momentum transfer cross section and cross sections for 31 rotational excitation, 29 rotational deexcitation, 10 vibrational excitation, 17 electronic excitation, 2 neutral dissociation, and 5 ionization collision processes. Electron transport coefficients in N2, N2/He, and N2/Ar are calculated by Monte Carlo method with considering anisotropic inelastic electron scattering and partitioning of the residual energy after the ionization collision on the basis of experimental results. The reliability of the proposed electron collision cross section set is demonstrated by comparing the calculated and measured electron transport coefficients in a wide range of reduced electric fields, E/N (E: electric field strength, N: number density of gas molecules). Comparison of the values of the electron transport coefficients in N2 calculated from eight individual cross section sets partly provided on LXCat with the measured values is also carried out. Furthermore, the effect of anisotropic inelastic electron scattering on the electron transport coefficients is examined. The electron transport coefficients in N2 are found to be affected by considering anisotropic electron scattering with increasing E/N values, and the longitudinal third-order transport coefficient is found to be sensitive to considering anisotropic electron scattering even at middle E/N values.



中文翻译:

为 N2 和 N2、N2/He 和 N2/Ar 中的电子传输设置的电子碰撞截面

提出了为N 2设置的电子碰撞截面。建议的集合包括振动弹性动量传递截面和 31 次旋转激发、29 次旋转去激、10 次振动激发、17 次电子激发、2 次中性解离和 5 次电离碰撞过程的截面。N 2、N 2 /He 和 N 2 中的电子传输系数/Ar是在实验结果的基础上,考虑各向异性非弹性电子散射和电离碰撞后剩余能量的分配,通过蒙特卡罗方法计算得到的。所提出的电子碰撞截面组的可靠性通过比较计算和测量的电子传输系数在宽范围的减小电场中得到证明,E / NE:电场强度,N:气体分子的数量密度)。N 2 中电子传输系数值的比较LXCat 上部分提供的八个单独的横截面组与测量值一起计算。此外,检查了各向异性非弹性电子散射对电子传输系数的影响。发现N 2中的电子传输系数受到考虑随E / N值增加的各向异性电子散射的影响,并且发现纵向三阶传输系数对考虑各向异性电子散射很敏感,即使在中间E / N值。

更新日期:2021-03-17
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