We design and fabricate ultra-broadband achromatic metalenses operating from the visible into the short-wave infrared, 450–1700 nm, with diffraction-limited performance. A hybrid 3D architecture, which combines nanoholes with a phase plate, allows realization in low refractive index materials. As a result, two-photon lithography can be used for prototyping while molding can be used for mass production. Experimentally, a 0.27 numerical aperture (NA) metalens exhibits 60% average focusing efficiency and 6% maximum focal length error over the entire bandwidth. In addition, a 200 μm diameter, 0.04 NA metalens was used to demonstrate achromatic imaging over the same broad spectral range. These results show that 3D metalens architectures yield excellent performance even using low-refractive index materials, and that two-photon lithography can produce metalenses operating at visible wavelengths.

中文翻译：

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超宽带3D消色差金属

我们设计并制造了从可见光到450-1700 nm的短波红外波段的超宽带消色差金属感镜，具有有限的衍射性能。将纳米孔与相板结合在一起的混合3D体系结构可以实现低折射率材料。结果，两光子光刻可以用于原型制作，而成型可以用于批量生产。实验上，一个0.27数值孔径（NA）的金属粉在整个带宽上表现出60％的平均聚焦效率和6％的最大焦距误差。此外，使用直径为200μm的0.04 NA金属元素来证明在相同的宽光谱范围内进行消色差成像。这些结果表明，即使使用低折射率材料，3D Metalens架构也能提供出色的性能，