Cointegration and coupling a perfect metamaterial absorber (PMA) together with a film bulk acoustic wave resonator (FBAR) in a monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors of high sensitivity. An optimized ultrathin multilayer stack was implemented to realize the proposed device. It is experimentally demonstrated that the resonance frequency of the FBAR can be used efficiently as a sensor output as it downshifts linearly with the intensity of the incident infrared irradiation. The resulting sensor also achieves a high absorption of 88% for an infrared spectrum centered at a wavelength of 8.2 μm. The structure is compact and can be easily integrated on a CMOS-compatible chip since both the FBAR and PMA utilize and share the same stack of metal and dielectric layers.

中文翻译：

---

双重功能超材料可实现超紧凑，高度灵敏的非制冷红外传感器

为了生产高灵敏度的超紧凑，非制冷红外传感器，引入了整体集成和完美的超材料吸收器（PMA）与薄膜体声波谐振器（FBAR）的单片集成。实现了优化的超薄多层堆叠，以实现所提出的器件。实验证明，FBAR的共振频率随着入射红外辐射的强度线性降低而可以有效地用作传感器输出。对于以8.2μm波长为中心的红外光谱，所得的传感器还实现了88％的高吸收率。由于FBAR和PMA都利用并共享相同的金属和介电层堆栈，因此该结构紧凑且可以轻松集成在CMOS兼容芯片上。