Abstract

The paper presents a theoretical study of the correlation of errors in the thickness of layers of multilayer optical coatings produced using monochromatic monitoring of the deposition process. Estimates of the degree of error correlation in layer thicknesses are obtained for various algorithms for determining termination instants for layer depositions. It is shown that the parameter introduced to assess the degree of correlation gives an adequate idea of the error correlation in the case of monochromatic monitoring.

中文翻译：

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光学镀膜沉积单色监测中的误差相关性

摘要

本文提出了一种理论研究，该研究利用单色监测沉积过程生产的多层光学涂层的厚度误差之间的相关性。对于用于确定层沉积的终止时刻的各种算法，获得了层厚度中的误差相关程度的估计。结果表明，在单色监控的情况下，引入用于评估相关程度的参数可以很好地理解误差相关性。