Dynamic links of high-precision stage systems consist of wires and hoses that are used for example to transport electrical current to the actuators and sensors or cooling liquids to the stages. During stage motion, these dynamic links typically express complex hysteretic behavior due to internal friction and viscoelastic properties. As such, dynamic links give rise to unwanted disturbances acting on the high-precision stage systems. This paper presents a simple but accurate physics-based and experimental modeling procedure. The generalized Maxwell model and a modification of the Iwan model are combined in parallel to capture both frequency dependencies by viscoelastic effects and amplitude dependencies by friction-based effects. The modified and physically meaningful Iwan model is shown to be equivalent to the well-known Bouc–Wen model. A so-called normalized dissipation factor is introduced to quickly recognize frequency and/or amplitude dependent behavior using measured data. Using this information, a well-founded choice for an (initial) model structure to be identified can be made. Subsequently, an identification procedure is proposed to estimate values of the model parameters again using the measured data. A simulated experiment is used to show the use of the normalized dissipation factor and validate the identification procedure. Finally, the validity and usefulness of the Maxwell–Iwan modeling approach is demonstrated by experimental results obtained from an industrial wafer stage system.

高精度平台系统的动态链接由电线和软管组成，这些电线和软管用于例如将电流传输到执行器和传感器，或者将冷却液传输到平台。在舞台运动期间，由于内部摩擦和粘弹特性，这些动态链接通常表现出复杂的磁滞行为。这样，动态链接会导致对高精度平台系统产生不必要的干扰。本文提出了一个简单但准确的基于物理和实验的建模过程。并行组合了广义Maxwell模型和Iwan模型的修改，以捕获粘弹性效应的频率依赖性和基于摩擦效应的振幅依赖性。修改后的，具有实际意义的Iwan模型与已知的Bouc-Wen模型等效。引入了所谓的归一化耗散因数，以使用测量数据快速识别频率和/或幅度相关的行为。使用此信息，可以为要确定的（初始）模型结构做出有根据的选择。随后，提出了一种识别程序，以使用测量数据再次估计模型参数的值。模拟实验用于说明归一化损耗因数的使用并验证识别过程。最后，从工业晶圆载物台系统获得的实验结果证明了Maxwell-Iwan建模方法的有效性和实用性。可以为要确定的（初始）模型结构做出有根据的选择。随后，提出了一种识别程序，以使用测量数据再次估计模型参数的值。模拟实验用于说明归一化损耗因数的使用并验证识别过程。最后，从工业晶圆载物台系统获得的实验结果证明了Maxwell-Iwan建模方法的有效性和实用性。可以为要确定的（初始）模型结构做出有根据的选择。随后，提出了一种识别程序，以使用测量数据再次估计模型参数的值。模拟实验用于说明归一化损耗因数的使用并验证识别过程。最后，从工业晶圆载物台系统获得的实验结果证明了Maxwell-Iwan建模方法的有效性和实用性。