We discuss physical processes underlying the generation of ion beams with high emission current density in electrohydrodynamic (EHD) emitters based on liquid metals and alloys and with room temperature ionic liquids. We consider EHD effects that influence the emission of ions (ion production mechanisms) and the kinetics of ion interactions in high-density beams. We analyze the factors determining the emission zone size, sustainability of emission at high and low currents, generation of clusters, increase in energy spread, decrease in brightness, and other features of ion beams. We consider the specific design features of EHD emitters and the problems of practically ensuring their stable operation. Discussed in detail are modern application areas for ion sources with EHD emitters, including technological installations for ion beam lithography, micro- and nanopatterning, ion microscopes and tools for local mass spectrometry of secondary ions, and systems to control and neutralize the potential of spacecraft as well as electrostatic rocket engines (microthrusters). We analyze prospects for further development of EHD emitters themselves and instruments based on them.

我们讨论了在基于液态金属和合金以及室温离子液体的电流体动力学 (EHD) 发射器中产生具有高发射电流密度的离子束的物理过程。我们考虑影响离子发射（离子产生机制）和高密度束中离子相互作用动力学的 EHD 效应。我们分析了决定发射区大小、高电流和低电流下发射的可持续性、簇的产生、能量扩散的增加​​、亮度的降低以及离子束的其他特征的因素。我们考虑了 EHD 发射器的具体设计特点以及实际确保其稳定运行的问题。详细讨论了具有 EHD 发射器的离子源的现代应用领域，包括离子束光刻技术装置，微米和纳米图案、离子显微镜和二次离子局部质谱分析工具，以及控制和中和航天器潜力的系统以及静电火箭发动机（微型推进器）。我们分析了 EHD 发射器本身和基于它们的仪器的进一步发展前景。