For optical measurements of areal surface topography, the instrument transfer function (ITF) quantifies height response as a function of the lateral spatial frequency content of the surface. The ITF is used widely for optical full-field instruments such as Fizeau interferometers, confocal microscopes, interference microscopes, and fringe projection systems as a more complete way to characterize lateral resolving power than a single number such as the Abbe limit. This paper is a comprehensive review of the ITF, including standardized definitions, ITF prediction using theoretical simulations, common uses, limitations, and evaluation techniques using material measures.

对于平面表面形貌的光学测量，仪器传递函数（ITF）将高度响应量化为表面横向空间频率含量的函数。ITF被广泛用于光学全场仪器，例如Fizeau干涉仪，共聚焦显微镜，干涉显微镜和条纹投影系统，是表征横向分辨能力的一种较完整的方法，而不是诸如Abbe极限之类的单个数字。本文是对ITF的全面回顾，包括标准化定义，使用理论模拟进行的ITF预测，常见用途，局限性以及使用实质性措施的评估技术。