This paper reports on the fabrication of 1–3 piezocomposite with hexagonal pillars for high frequency ultrasonic transducer based on the cold ablation technique. The piezocomposite with hexagonal pillars was designed, simulated, and fabricated using an ultraviolet picosecond laser. It performs better than the piezocomposite with other pillar shapes like square. The edge length and height of the hexagonal PZT pillar were 10 μm and 36 μm, the width of the kerf was about 5 μm. The 1–3 piezocomposite with a resonance frequency of 51.2 MHz and a coupling coefficient of 0.69 was fabricated. The transducer with fabricated 1–3 piezocomposite was prototyped and characterized. Compared to the conventional dice-and-fill technique, the cola ablation process allows for the manufacturing of 1–3 piezocomposites with higher variability of pillar design and distribution as well as smaller structural size. It suggests that the cold ablation process proves to be suitable for the fabrication of high frequency composite and transducers.

本文报道了基于冷消融技术的用于高频超声换能器的带有六角形支柱的1-3压电复合材料的制造。使用紫外皮秒激光器设计，模拟和制造了具有六角形支柱的压电复合材料。它的性能优于压电复合材料以及其他类似正方形的支柱形状。六角形PZT柱的边缘长度和高度分别为10μm和36μm，切口的宽度约为5μm。制作了具有31.2 MHz共振频率和0.69耦合系数的1-3压电复合材料。具有制成的1-3压电复合材料的换能器已经过原型设计和表征。与传统的骰子填充技术相比，可乐烧蚀工艺可制造1-3种压电复合材料，其支柱设计和分布的可变性更高，结构尺寸也更小。这表明冷消融工艺被证明适合于高频复合材料和换能器的制造。