Fluidics is one of the most historic subjects that are well-established over centuries on the macroscopic scale. In recent years, fluid detection using a number of micro/nano scale devices has been achieved. However, the interaction of microfluid and solid devices on micro/nano-meter scale still lacks in-depth research. We demonstrate a practical nanomechanical detector for microfluidics via a string resonator with high Q-factor, suspended over a hole. This device is placed under a jet nozzle with several microns of diameter, and the interaction between the micro-gas flow and the resonator is observed by monitoring the variation of the fundamental frequency and the quality factor. Moreover, we manage to measure the fluctuations of the micro-gas flow on the nanomechanical resonator by means of stochastic resonance. This work manifests a potential platform for detecting dynamical fluid behaviors at microscopic scale for novel fluid physics.

流体学是最具历史意义的学科之一，在宏观尺度上已经建立了几个世纪。近年来，已经实现了使用许多微/纳米级设备的流体检测。然而，微/纳米尺度上的微流体与固体器件的相互作用仍缺乏深入的研究。我们通过具有高Q 值的弦谐振器展示了一种实用的微流体纳米机械检测器-因素，悬浮在一个洞上。该装置置于直径数微米的射流喷嘴下方，通过监测基频和品质因数的变化，观察微气流与谐振腔的相互作用。此外，我们设法通过随机共振测量纳米机械谐振器上微气流的波动。这项工作展示了一个潜在的平台，用于在微观尺度上检测动态流体行为，以用于新的流体物理学。