This paper describes a hybrid mass sensing system comprising a QCM (quartz crystal microbalance) mass sensor operating under atmospheric pressure and a 3-DOF mode localized coupled resonator operating in vacuum. Nanoparticles as consecutive mass perturbations are added onto the QCM, the output signals with respect to the amount of mass change are then being manipulated to generate electrostatic forces. Subsequently, the electrostatic forces act on the 3-DOF mode localized coupled resonator as external stiffness perturbations. The output metrics of the hybrid system were defined as: the resonant frequency shifts, vibration amplitude changes, and the changes in resonance amplitude ratio. Measured data was analyzed for these metrics and compared. This work demonstrated that the proposed hybrid mass sensing system attained a ${2.5\times }10^{\text 6}{N}{(\text{m}\bullet \text{kg})}^{-1}$ mass to stiffness transduction factor, and has the potential to be employed as a direct liquid contact biochemical transducer.

中文翻译：

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通过将QCM质量传感器与3-DOF模式局部耦合谐振器刚度传感器相结合，实现混合质量传感系统

本文介绍了一种混合质量传感系统，包括一个在大气压下运行的QCM（石英晶体微天平）质量传感器和一个在真空下运行的3-DOF模式局部耦合谐振器。将纳米颗粒作为连续的质量扰动添加到QCM上，然后操纵相对于质量变化量的输出信号以生成静电力。随后，静电力作为外部刚度扰动作用在3-DOF模式局部耦合谐振器上。混合系统的输出指标定义为：共振频率偏移，振动振幅变化和共振振幅比变化。对这些指标的测量数据进行了分析并进行了比较。这项工作表明，提出的混合质量感测系统达到了 $ {2.5 \ times} 10 ^ {\ text 6} {N} {（\ text {m} \ bullet \ text {kg}）} ^ {-1} $ 质量到刚度的转换因子，并有可能被用作直接液体接触生化传感器。