An increasing number of micro/nano-components with complex structures have emerged in recent years. Different kinds of feature sizes usually exist in a single component and require the use of instruments with nanometer-level accuracy. The traditional types of equipment cannot meet the current demands because of their lack of function and effectiveness. In this study, a multifunctional probe is designed by combining the interference and focusing principles. The Linnik principle is adopted in the interferometry module for its high vertical resolution and large horizontal range and its ability to measure surface topography. The focusing module modified from a Blue-ray DVD pickup head has a high horizontal resolution and a large vertical range suitable for measuring step height and line/groove width. The two modules share a polarizing beam splitter and an objective lens to reduce probe size. Then, the probe is manufactured, calibrated, and verified by measuring the surface topography with a reference height of 100 nm, a step height of approximately $4~\mu \text{m}$ , and a diameter of approximately $25~\mu \text{m}$ . The proposed probe has a high resolution and large range in 3D and can measure high-precision components with multiple features.

中文翻译：

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一种用于测量微结构的高精度多功能探头的开发

近年来出现了越来越多的具有复杂结构的微/纳米组分。通常在单个组件中存在不同类型的特征尺寸，并且需要使用具有纳米级精度的仪器。传统类型的设备由于缺乏功能和有效性而无法满足当前的需求。在这项研究中，通过结合干涉和聚焦原理设计了一种多功能探头。干涉测量模块采用Linnik原理，因为它具有较高的垂直分辨率和较大的水平范围，并且具有测量表面形貌的能力。由蓝光DVD拾取头改造而成的聚焦模块具有较高的水平分辨率和较大的垂直范围，适用于测量台阶高度和线/槽宽度。这两个模块共享一个偏振分束器和一个物镜，以减小探头尺寸。然后，通过测量参考高度为100 nm，步长约为100 nm的表面形貌来制造，校准和验证探头 $ 4〜\ mu \ text {m} $ ，直径约为 $ 25〜\ mu \ text {m} $ 。所提出的探头具有高分辨率和3D大范围，并且可以测量具有多种功能的高精度组件。