In this investigation, we propose a strip segmentation phase (SSP) method for a spatial light modulator (SLM) to generate independent multifocal spots when the beam passes through a high numerical aperture (NA) lens. With the SSP method, multifocal spots can be generated with each spot independently, flexibly and uniformly distributed. The performance of the SSP method is first validated with numerical simulation. Then, by applying the modulation method with SLM and importing the beams into an inverted fluorescence microscopy system with a high-NA lens, the spot distribution and their shapes can be observed by fluorescent image. The fluorescent image exhibits high uniformity and high consistency with the aforementioned numerical simulations. Finally, we dynamically load a series of phase maps on SLM to realize continuous and independent spot movement in a multifocal array. By laser direct writing on photoresist, a complex NWU-shape structure can be realized flexibly with multi-task fabrication capability. The SSP method can significantly improve the efficiency and flexibility of laser direct writing. It is also compatible with most recent techniques, e.g., multiphoton absorption, stimulated emission depletion and photo-induced depolymerization etc., to realize parallel super-resolution imaging and fabrications.

中文翻译：

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通过多焦点点调制实现柔性平行激光直接写入

在这项研究中，我们提出一种带状分割阶段（SSP）的方法，用于空间光调制器（SLM）当光束通过高数值孔径（NA）透镜时产生独立的多焦点。使用SSP方法，可以在每个斑点独立，灵活且均匀分布的情况下生成多焦点斑点。首先通过数值模拟验证了SSP方法的性能。然后，通过应用具有SLM的调制方法并将光束导入具有高NA透镜的倒置荧光显微镜系统中，可以通过荧光图像观察光斑分布及其形状。通过前述数值模拟，荧光图像表现出高均匀性和高一致性。最后，我们在SLM上动态加载一系列相位图，以实现多焦点阵列中连续且独立的光斑移动。通过在光致抗蚀剂上进行激光直接写入，可以灵活地实现具有多任务制造能力的复杂NWU形结构。SSP方法可以显着提高激光直写的效率和灵活性。它也与最新技术兼容，例如多光子吸收，受激发射损耗和光致解聚等，以实现并行超分辨率成像和制造。