High-temperature β-Ga₂O₃:Cr₂O₃-based sensors sensitive to oxygen- and hydrogen-containing gases have been developed and studied. Magnetron cosputtering is the method of choice for the thin film synthesis as an industry-compatible technique. The composition-structure-properties relationship has been revealed. An introduction of 0.04–0.14 wt. % Cr leads to a significant increase in the response of the O₂ sensors over the temperature range 250–400 °C. The highest response in the above-mentioned temperature range has been achieved for a Cr addition of 0.14 wt. %. An increase in the Cr content from 0.04 to 0.22 wt. % leads to a decrease in the β-Ga₂O₃-based sensors’ response time, especially for low O₂ concentrations (≤10 vol. %). Reliable control of the β-Ga₂O₃:Cr₂O₃-based sensors’ selectivity to industry-relevant reducing gases—hydrogen, carbon monoxide, and toluene—is demonstrated. β-Ga₂O₃ films with a Cr incorporation content of 0.04 and 0.06 wt. % have a high response to toluene at operating temperatures 300–500 °C, while the films with 0.14 and 0.22 wt. % Cr have a high response to H₂ in the range 400–500 °C. Regardless of the Cr content in β-Ga₂O₃ thin films, all sensors considered demonstrate a weak response to CO within the operating temperature range 250–500 °C. The results attained are of certain technological importance, i.e., in terms of the development of cost-effective methods for the synthesis of materials and systems for monitoring and control of industry-relevant gases for an environmentally friendly and sustainable growth.

中文翻译：

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Cr2O3添加剂对β-Ga2O3薄膜对氧气，氢气，一氧化碳和甲苯蒸气的气敏特性的影响

高温的β-Ga ₂ ö ₃：的Cr _2个ö ₃系传感器含氧和含氢的气体，已经开发和研究了敏感。磁控共溅射是薄膜合成的一种工业兼容技术。已经揭示了组成-结构-性质的关系。引入0.04-0.14 wt。在250–400°C的温度范围内，％Cr会导致O ₂传感器的响应显着增加。Cr添加量为0.14 wt。％时，在上述温度范围内可获得最高响应。％。Cr含量从0.04wt。％增加到0.22wt。％。％，则导致在降低的β-Ga ₂ ö ₃传感器的响应时间，尤其是对于低O ₂浓度（≤10 vol。％）。的可靠控制的β-Ga ₂ ö ₃：的Cr ₂ ö ₃基传感器的选择性行业相关的还原性气体，氢气，一氧化碳，和甲苯是证明。的β-Ga _2层ö ₃薄膜具有0.04和0.06重量％的铬含量掺入。％的薄膜在300-500°C的工作温度下对甲苯有很高的响应，而重量百分比为0.14和0.22的薄膜则具有较高的响应性。在400–500°C的范围内，％Cr对H _2的响应较高。无论在Cr含量的的β-Ga ₂ ö ₃薄膜，所有考虑的传感器在250–500°C的工作温度范围内均表现出对CO的弱响应。所获得的结果具有一定的技术重要性，即，在开发具有成本效益的材料合成方法以及用于监测和控制与工业有关的气体的系统的系统方面，以实现环境友好和可持续的增长。