Optical and material properties of nickel-doped zinc oxide (ZnO-Ni) grown by metalorganic chemical vapor deposition with varying Ni source flow rates are investigated. ZnO-Ni showed a good crystal quality with (002) orientation but deteriorated at high Ni source flow rates. Photoluminescence responses show a reduction in the bandgap of ZnO-Ni with an increase in the Ni source flow and also with an increase in the temperature. Ni-doping can enhance luminescences at low concentrations (<25 SCCM and ∼2%) and suppress at high concentrations. Ni-related defects occur more toward the surface than bulk of the thin films. Longitudinal optical phonon replicas named 1LO and 2LO redshifts at low Ni source flow rates ≤100 SCCM with an increase in the temperature from 14 to 300 K, but exhibits an “S-shaped” red-blue-red shift with a dip at 50 K at higher Ni source flow rates (150 SCCM). Ni-doping also induces asymmetric crystal vibrations and rougher surfaces with the Ni incorporation. This study enhances the understanding of Ni-doped ZnO that is needed to apply transition-metal doped ZnO for various optoelectronic applications.

中文翻译：

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金属有机化学气相沉积技术研究蓝宝石表面掺Ni的ZnO薄膜的多技术研究

研究了通过金属有机化学气相沉积法制备的掺杂镍的氧化锌（ZnO-Ni）的光学和材料特性，其中Ni的流量不同。ZnO-Ni在（002）方向上显示出良好的晶体质量，但在高Ni源流量下会劣化。光致发光响应表明，随着Ni源流量的增加以及温度的升高，ZnO-Ni的带隙减小。镍掺杂可以在低浓度（<25 SCCM和〜2％）时增强发光，而在高浓度时可以抑制发光。与镍相关的缺陷比薄膜的体积更容易向表面产生。在低Ni源流量≤100 SCCM的情况下，名为1LO和2LO的纵向光学声子复制品会发生红移，并且温度会从14 K升高到300 K，但在较高的镍源流量（150 SCCM）下，在50 K处出现“ S形”红-蓝-红偏移。掺入镍还会引起不对称的晶体振动和掺入镍的粗糙表面。这项研究增强了对掺有镍的ZnO的理解，这对于在各种光电应用中应用过渡金属掺杂的ZnO是必需的。