We report on the precise measurement of the thermal mismatch induced stress by dynamic resonance method. The metallic electrodes are deposited on a single-crystal diamond microelectromechanical resonator for the Joule heating and stress generation. The results show that the resonance frequency is linearly dependent on the induced stress. The stress resolution in this work is as precise as 10⁴ Pa, which is three orders of magnitude better than those obtained by Raman and X-ray diffraction methods.

中文翻译：

---

基于金刚石MEMS的动态共振热失配诱导应力表征

我们报告了通过动态共振方法精确测量热失配引起的应力。金属电极沉积在单晶金刚石微机电谐振器上，用于焦耳加热和应力生成。结果表明，共振频率与诱导应力呈线性关系。这项工作中的应力分辨率精确到10 ⁴ Pa，比拉曼和X射线衍射方法获得的应力分辨率高三个数量级。