In this study, the bandpass filter characteristics in standing wave resonator formed in a two‐dimensional (2D) photonic crystal (PC) is integrated with microelectromechanical systems (MEMS) actuator to tune degenerate mode split. A single and sequentially connected indirect coupling structure consisting of waveguide as well as cavity is placed to the 2D PC. It has been shown that the modes of the bands can be split by structural deformation of the PC via MEMS actuator. The modes frequencies can be changed with the bias voltage applied to MEMS structure, which allows to tune about 1 THz (λ = 35 nm). The designed PC and MEMS structures are analyzed with simulation programs using finite difference time domain method and finite element method, respectively. The proposed PC structures can be effectively used in new generation all optical THz communication applications.

中文翻译：

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光子晶体带通滤波器利用MEMS致动器可调节的简并模式进行太赫兹应用

在这项研究中，将二维（2D）光子晶体（PC）中形成的驻波谐振器中的带通滤波器特性与微机电系统（MEMS）致动器集成在一起，以调节简并模式分裂。将由波导以及空腔组成的单个且顺序连接的间接耦合结构放置到2D PC上。已经表明，可以通过MEMS致动器通过PC的结构变形来分裂频带的模式。可以通过施加到MEMS结构的偏置电压来改变模式频率，从而可以调谐大约1 THz（λ= 35 nm）。分别使用有限差分时域法和有限元法，通过仿真程序对设计的PC和MEMS结构进行了分析。