Micro-supercapacitors are enormously needed, owing to increasing energy demands in miniaturizing mobile electronic devices. Manganese dioxide (MnO₂) is one of the most popular micro-supercapacitor electrode materials that can be applied with various fabrication methods. However, in case of the conventional fabrication of MnO₂-based micro-supercapacitor, fabrication methods require complex multiple steps or sophisticated patterning techniques for MnO₂ selective micro-patterning. Thus, it is difficult to improve space utilization of micro-supercapacitor and apply them to further another application. In this study, we introduce a novel fabrication method of hierarchical planar micro-supercapacitor using MnO₂ nanowire (NW) arrays. Using laser-induced hydrothermal growth (LIHG) process, MnO₂ NW arrays are vertically grown on selective area in the desired location under ambient conditions. For the stable growth of vertically aligned MnO₂ NW array using LIHG process, various laser parameters, including irradiation time and power, are adjusted. Afterward, the vertically grown MnO₂ NW arrays are applied to fabricate hierarchical planar micro-supercapacitor, showing high areal capacitance of 227 mF cm⁻² (at 1 mA cm⁻²) in terms of footprint area on tiny 2D plane. Thus, the proposed approach can be considered as a new fabrication method for capacitance enhancement of planar micro-supercapacitor.

由于在使移动电子设备小型化中不断增加的能量需求，因此迫切需要微型超级电容器。二氧化锰（MnO ₂）是最流行的微型超级电容器电极材料之一，可用于各种制造方法。然而，在常规制造基于MnO ₂的微型超级电容器的情况下，制造方法需要复杂的多个步骤或用于MnO ₂选择性微型构图的复杂构图技术。因此，难以提高微超级电容器的空间利用率并将其应用于其他应用。在这项研究中，我们介绍了一种使用MnO ₂的分层平面微型超级电容器的新制造方法。纳米线（NW）阵列。使用激光诱导的水热生长（LIHG）工艺，MnO ₂ NW阵列在环境条件下在所需位置的选定区域上垂直生长。为了使用LIHG工艺稳定生长垂直排列的MnO ₂ NW阵列，需要调整各种激光参数，包括照射时间和功率。然后，将垂直生长的MnO ₂ NW阵列应用于制造分层平面微型超级电容器，就微小2D平面上的覆盖面积而言，显示出227 mF cm ^-2（在1 mA cm ^-2）的高面积电容。因此，所提出的方法可以被认为是用于平面微型超级电容器的电容增强的一种新的制造方法。