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Multicomponent SF 6 decomposition product sensing with a gas-sensing microchip
Microsystems & Nanoengineering ( IF 7.9 ) Pub Date : 2021-03-01 , DOI: 10.1038/s41378-021-00246-1
Jifeng Chu 1 , Aijun Yang 1 , Qiongyuan Wang 1 , Xu Yang 1 , Dawei Wang 1 , Xiaohua Wang 1 , Huan Yuan 1 , Mingzhe Rong 1
Affiliation  

A difficult issue restricting the development of gas sensors is multicomponent recognition. Herein, a gas-sensing (GS) microchip loaded with three gas-sensitive materials was fabricated via a micromachining technique. Then, a portable gas detection system was built to collect the signals of the chip under various decomposition products of sulfur hexafluoride (SF6). Through a stacked denoising autoencoder (SDAE), a total of five high-level features could be extracted from the original signals. Combined with machine learning algorithms, the accurate classification of 47 simulants was realized, and 5-fold cross-validation proved the reliability. To investigate the generalization ability, 30 sets of examinations for testing unknown gases were performed. The results indicated that SDAE-based models exhibit better generalization performance than PCA-based models, regardless of the magnitude of noise. In addition, hypothesis testing was introduced to check the significant differences of various models, and the bagging-based back propagation neural network with SDAE exhibits superior performance at 95% confidence.



中文翻译:

使用气体传感微芯片进行多组分 SF 6 分解产物传感

制约气体传感器发展的一个难题是多组分识别。在此,通过微加工技术制造了装载有三种气敏材料的气敏 (GS) 微芯片。然后,搭建了便携式气体检测系统,采集芯片在六氟化硫(SF 6)。通过堆叠去噪自编码器(SDAE),可以从原始信号中提取总共五个高级特征。结合机器学习算法,实现了47个模拟物的准确分类,5折交叉验证证明了可靠性。为了考察泛化能力,进行了 30 组未知气体测试。结果表明,无论噪声大小如何,基于 SDAE 的模型都比基于 PCA 的模型表现出更好的泛化性能。此外,还引入了假设检验来检查各种模型的显着差异,带有 SDAE 的基于 Bagging 的反向传播神经网络在 95% 的置信度下表现出卓越的性能。

更新日期:2021-03-01
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