Abstract

Film bulk acoustic resonator (FBAR) based on single crystal LiNbO₃ are promising for next-generation high Q, wideband filters in telecommunications. The crystal orientation of LiNbO₃ has significant impacts on the FBAR performance, and the bulk acoustic wave (BAW) velocity was calculated by solving the Christoffel’s equation in each crystal orientation. The electromechanical coupling coefficient of every cut was obtained. Moreover, the impedance information and the film displacement of various crystal orientations were analyzed by the finite element method (FEM). Analytical results demonstrate that the effective coupling coefficient and the number of BAW modes vary with the crystal orientation.

摘要

基于单晶LiNbO _3的薄膜压电谐振器（FBAR）在电信领域的下一代高Q宽带滤波器中很有希望。LiNbO ₃的晶体取向对FBAR性能有重要影响，并且通过求解每个晶体取向上的Christoffel方程来计算体声波（BAW）速度。获得每个切口的机电耦合系数。此外，通过有限元方法（FEM）分析了各种晶体取向的阻抗信息和膜位移。分析结果表明，有效耦合系数和BAW模式的数量随晶体取向而变化。