Abstract

In this paper, the performance parameters, capacitance and leakage current of Al₂O₃, ZnO and MgO doped Ba_0.7Sr_0.3TiO₃ ceramics based metal-insulator-metal (MIM) capacitors are investigated. The specific capacitance of intrinsic Ba_0.7Sr_0.3TiO₃ ceramic based MIM capacitor changes with frequency whereas Al₂O₃ doped Ba_0.7Sr_0.3TiO₃ ceramics based MIM capacitor exhibits almost frequency independent specific capacitance. 2.0 wt% ZnO doped Ba_0.7Sr_0.3TiO₃ ceramics based MIM capacitor exhibits highest specific capacitance. The doping of Ba_0.7Sr_0.3TiO₃ ceramics with ZnO is not sufficient for enhancing leakage current performance. On investigation, 4.0 wt% MgO doped Ba_0.7Sr_0.3TiO₃ ceramics based MIM capacitor is found better for energy storage application.

摘要

本文研究了Al ₂ O ₃，ZnO和MgO掺杂的Ba _0.7 Sr _0.3 TiO ₃陶瓷基金属-绝缘体-金属（MIM）电容器的性能参数，电容和漏电流。本征Ba _0.7 Sr _0.3 TiO ₃陶瓷基MIM电容器的比电容随频率变化，而掺杂Al ₂ O _3的Ba _0.7 Sr _0.3 TiO ₃陶瓷基MIM电容器的比电容几乎与频率无关。2.0 wt％ZnO掺杂的Ba _0.7 Sr _0.3 TiO₃陶瓷基MIM电容器具有最高的比电容。ZnO掺杂Ba _0.7 Sr _0.3 TiO ₃陶瓷不足以增强漏电流性能。经研究，发现4.0％（重量）的MgO掺杂的Ba _0.7 Sr _0.3 TiO ₃陶瓷基MIM电容器更适合储能应用。