Surface Submicron grating manufacturing has broad application prospects, which has also been the subject of intensive research and development by scholars with many efforts. In this paper, a grating coloring manufacturing method is proposed based on three-dimensional elliptical vibration cutting and non-resonant piezoelectric actuator. Based on the mechanism of elliptical motion, an effective cutting depth model was established. Nonlinear interaction of machining parameters (overlap rate, nominal cutting speed, vibration frequency) on the geometry of the grating were analyzed and controllable modulation model of grating geometry was established. The geometrical dimensions of the grating were predicted and grooved experiments were performed on brass and aluminum surfaces. A set of angle-adjustable detection device was designed independently to check the diffraction quality of the grating. The quantitative experimental results show that grating distances of copper and aluminum rods are 752 nm and 684 nm, respectively. The average width of the aluminum rod overall grating is 764 nm, the accuracy error is 9.25%. In addition, aluminum rod gratings can diffract red light at non-specific angles, which is more effective at viewing angle of 70°. The experimental results are in agreement with the theory which have positive significance for expanding the functional surface.

表面亚微米光栅的制造具有广阔的应用前景，也是学者们的不懈努力和深入研究的课题。本文提出了一种基于三维椭圆振动切割和非谐振压电致动器的光栅着色制造方法。基于椭圆运动机理，建立了有效的切削深度模型。分析了加工参数（重叠率，标称切削速度，振动频率）对光栅几何形状的非线性影响，建立了光栅几何形状的可控调制模型。可以预测光栅的几何尺寸，并在黄铜和铝表面上进行开槽实验。独立设计了一套角度可调检测装置，以检查光栅的衍射质量。定量实验结果表明，铜和铝棒的光栅距离分别为752 nm和684 nm。铝棒整体光栅的平均宽度为764 nm，精度误差为9.25％。此外，铝棒光栅可以以非特定角度衍射红光，这在70°视角下更为有效。实验结果与理论吻合，对扩展功能表面具有积极意义。准确度误差为9.25％。另外，铝棒光栅可以以非特定角度衍射红光，这在70°视角下更为有效。实验结果与理论吻合，对扩展功能表面具有积极意义。准确度误差为9.25％。此外，铝棒光栅可以以非特定角度衍射红光，这在70°视角下更为有效。实验结果与理论吻合，对扩展功能表面具有积极意义。