Abstract

The measurements of the reflection and transmission coefficients of platinum films with thicknesses of 1–30 nm fabricated on quartz substrates using magnetron sputtering are reported. The measurements were conducted in a rectangular waveguide at frequencies of 9–11 GHz. For a wave falling onto the Pt film from the quartz substrate side (Q‒Pt orientation), the growth of the absorption coefficient (A_max = 0.45) and the presence of a pronounced minimum of the reflection coefficient (R_min = 0.23) for the 3-nm-thick film have been observed. In films thinner than 10 nm, the values measured are consistent with the calculations performed with the model thickness dependence of conductivity. The specific conductivity of the Pt films as a function of thickness has been calculated using the approximate boundary conditions and the measured reflection coefficients.

中文翻译：

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测量铂超薄膜的微波电导率

摘要

报道了使用磁控溅射在石英基板上制造的厚度为1–30 nm的铂膜的反射和透射系数的测量结果。测量是在矩形波导中以9-11 GHz的频率进行的。对于从石英基板侧（Q‒Pt方向）落到Pt膜上的波，吸收系数的增长（A _max = 0.45）和反射系数的最小值（R _min= 0.23）对于3纳米厚的薄膜已被观察到。在小于10 nm的薄膜中，测得的值与电导率与模型厚度相关的计算结果一致。已使用近似边界条件和测得的反射系数计算了Pt膜的比电导率与厚度的关系。