Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of x-ray space observatories. These arrays are required to achieve an energy resolution ΔE < 3 eV full width at half maximum (FWHM) in the soft x-ray energy range. We are currently developing x-ray microcalorimeter arrays for use in the future laboratory and space-based x-ray astrophysics experiments and ground-based spectrometers. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with 140 × 30 μm² Ti/Au TESs with the Au x-ray absorber. We report on extensive measurements on 60 pixels in order to show the uniformity of our large TES array. The averaged critical temperature is T_c = 89.5 ± 0.5 mK, and the variation across the array (∼1 cm) is less than 1.5 mK. We found a large region of detector’s bias points between 20% and 40% of the normal-state resistance where the energy resolution is constantly lower than 3 eV. In particular, results show a summed x-ray spectral resolution ΔE_FWHM = 2.50 ± 0.04 eV at a photon energy of 5.9 keV, measured in a single-pixel mode using a frequency domain multiplexing readout system developed at SRON/VTT at bias frequencies ranging from 1 MHz to 5 MHz. Moreover, we compare the logarithmic resistance sensitivity with respect to temperature and current (α and β, respectively) and their correlation with the detector’s noise parameter M, showing a homogeneous behavior for all the measured pixels in the array.

中文翻译：

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Ti / Au过渡边缘传感器微热量计的千像素阵列的性能和均匀性

统一的大型过渡边缘传感器（TES）阵列是下一代X射线空间天文台的基础。这些阵列需要在软X射线能量范围内实现能量分辨率ΔE <3 eV半峰全宽（FWHM）。我们目前正在开发X射线微热量计阵列，以用于未来的实验室以及基于空间的X射线天体物理学实验和基于地面的光谱仪。在此贡献中，我们对开发和均匀的32×32像素阵列的140×30的特性报告μ米²的Ti / Au的TESS有Au的X射线吸收体。我们报告了对60个像素的广泛测量，以显示大型TES阵列的均匀性。平均临界温度为T _c= 89.5±0.5 mK，整个阵列（约1 cm）的变化小于1.5 mK。我们发现在正常状态电阻的20％到40％之间，检测器的偏置点区域很大，其中能量分辨率始终低于3 eV。尤其是，结果显示在5.9 keV的光子能量下，使用SRON / VTT开发的频域多路复用读出系统以偏置频率在单像素模式下测得的总X射线光谱分辨率ΔE _FWHM = 2.50±0.04 eV范围从1 MHz到5 MHz。此外，我们比较了温度和电流（分别为α和β）的对数电阻灵敏度以及它们与检测器噪声参数M的相关性。，显示阵列中所有测量像素的均匀行为。