In this study, high-energy x-ray nanotomography (nano-computed tomography, nano-CT) based on full-field x-ray microscopy was developed. Fine two-dimensional and three-dimensional (3D) structures with linewidths of 75 nm–100 nm were successfully resolved in the x-ray energy range of 15 keV–37.7 keV. The effective field of view was ∼60 µm, and the typical measurement time for one tomographic scan was 30 min–60 min. The optical system was established at the 250-m-long beamline 20XU of SPring-8 to realize greater than 100× magnification images. An apodization Fresnel zone plate (A-FZP), specifically developed for high-energy x-ray imaging, was used as the objective lens. The design of the A-FZP for high-energy imaging is discussed, and its diffraction efficiency distribution is evaluated. The spatial resolutions of this system at energies of 15 keV, 20 keV, 30 keV, and 37.7 keV were examined using a test object, and the measured values are shown to be in good agreement with theoretical values. High-energy x-ray nano-CT in combination with x-ray micro-CT is applied for 3D multiscale imaging. The entire bodies of bulky samples, ∼1 mm in diameter, were measured with the micro-CT, and the nano-CT was used for nondestructive observation of regions of interest. Examples of multiscale CT measurements involving carbon steel, mouse bones, and a meteorite are discussed.

中文翻译：

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高能X射线纳米断层照相术介绍切趾菲涅耳波带片物镜

在这项研究中，开发了基于全场X射线显微镜的高能X射线纳米断层扫描（纳米计算机断层扫描，纳米CT）。在15 keV–37.7 keV的X射线能量范围内，线宽为75 nm–100 nm的精细二维和三维（3D）结构已成功解析。有效视场约为60 µm，一次断层扫描的典型测量时间为30分钟至60分钟。在SPring-8的250米长光束线20XU处建立了光学系统，以实现大于100倍的放大图像。专门为高能X射线成像而开发的切趾菲涅耳波带片（A-FZP）被用作物镜。讨论了用于高能成像的A-FZP的设计，并评估了其衍射效率分布。使用测试对象检查了该系统在15 keV，20 keV，30 keV和37.7 keV能量下的空间分辨率，并显示测量值与理论值非常吻合。高能X射线纳米CT与X射线微CT结合用于3D多尺度成像。用微型CT测量了直径约为1毫米的大块样品的整体，纳米CT用于感兴趣区域的无损观察。讨论了涉及碳钢，老鼠骨头和陨石的多尺度CT测量示例。