We present in this paper a new design of a capacitive calibration kit for scanning microwave microscopy (SMM). As demonstrated by finite element modelings, the produced devices are highly independent of material parameters due to their lateral configuration. The fabrication of these gold-based structures is realized by using well established clean-room techniques. SMM measurements are performed under different conditions, and all capacitive structures exhibit a strong contrast with respect to the non-capacitive background. The obtained experimental data are employed to calibrate the used SMM tips and to extract the capacitance of produced devices following a method based on the short-open-load calibration algorithm for one-port vector network analyzers. The comparison of experimental capacitance and nominal values provided by our models proves the applicability of the used calibration approach for a wide frequency range.

中文翻译：

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用于扫描微波显微镜的高级校准套件：设计，制造和测量

我们在本文中介绍了一种用于扫描微波显微镜（SMM）的电容校准套件的新设计。如有限元建模所证明的，由于其横向配置，所生产的设备与材料参数高度独立。这些金基结构的制造是通过使用完善的洁净室技术来实现的。SMM测量在不同条件下执行，并且所有电容性结构相对于非电容性背景均显示出强烈的对比度。根据用于单端口矢量网络分析仪的基于短时空载校准算法的方法，将获得的实验数据用于校准使用的SMM电极头并提取生产的设备的电容。