The productivity and quality of laser micromachining depend on multiple laser parameters that are intricately correlated. For these optimizations, a quick survey of laser parameters is vital. Recently, the authors developed a Yb-doped fiber chirped-pulse amplification system that can control various laser parameters in a wide range (pulse duration: 0.4–400 ps, repetition: single shot to 1 MHz, etc.). In this work, using this laser system, percussion microdrilling of three types of advanced ceramics, AlN, Al2O3, and Y2O3-doped ZrO2, was explored. In the case of the microdrilling of the Al2O3 ceramic, the ablation volume increased about 2–3 times as the pulse repetition increased from 100 Hz to 1 MHz. This suggests a different mechanism because the volume removal became dominant at 1 MHz. Scanning electron microscope observation confirmed a drastic melt formation at 1 MHz. From these, there is an additional volume removal due to the heat accumulation by multipulse irradiation on the Al2O3 ceramic at a higher repetition rate. It was also found that the variation of ablation volume with the pulse duration and fluence exhibited a big difference among these ceramics. A comprehensive survey of ultrafast laser ablation of ceramics was demonstrated.

中文翻译：

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陶瓷超快激光加工：激光参数综合调查

激光微加工的生产率和质量取决于多个错综复杂的激光参数。对于这些优化，激光参数的快速调查是至关重要的。最近，作者开发了一种掺镱光纤啁啾脉冲放大系统，可以在很宽的范围内控制各种激光参数（脉冲持续时间：0.4-400 ps，重复：单次发射到 1 MHz 等）。在这项工作中，使用该激光系统，探索了三种类型的高级陶瓷（AlN、Al2O3 和 Y2O3 掺杂的 ZrO2）的冲击微孔钻削。在对 Al2O3 陶瓷进行微钻孔的情况下，随着脉冲重复频率从 100 Hz 增加到 1 MHz，烧蚀量增加了约 2-3 倍。这表明了一种不同的机制，因为体积去除在 1 MHz 时占主导地位。扫描电子显微镜观察证实在 1 MHz 下形成了剧烈的熔体。从这些中，由于以更高的重复频率对 Al2O3 陶瓷进行多脉冲辐照而产生的热量积累，有额外的体积去除。还发现烧蚀体积随脉冲持续时间和能量密度的变化在这些陶瓷之间表现出很大差异。展示了对陶瓷超快激光烧蚀的全面调查。