The industrial maturity of ultrashort pulsed lasers has triggered the development of a plethora of material processing strategies. Recently, the combination of these remarkable temporal pulse properties with advanced structured light concepts has led to breakthroughs in the development of laser application methods, which will now gradually reach industrial environments. We review the efficient generation of customized focus distributions from the near-infrared down to the deep ultraviolet, e.g., based on nondiffracting beams and three-dimensional-beam splitters, and demonstrate their impact for micro- and nanomachining of a wide range of materials. In the beam shaping concepts presented, special attention was paid to suitability for both high energies and high powers.

中文翻译：

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用于超快激光微纳加工的结构光

超短脉冲激光器的工业成熟度引发了众多材料加工策略的发展。最近，这些卓越的时间脉冲特性与先进的结构光概念相结合，导致了激光应用方法开发的突破，该方法现在将逐步进入工业环境。我们回顾了从近红外到深紫外的自定义焦点分布的有效生成，例如，基于无衍射光束和三维光束分离器，并展示了它们对多种材料的微细加工和纳米加工的影响。在提出的波束成形概念中，特别注意了对高能量和高功率的适用性。