Thin films have many applications in the field of optics and photonics. One of these applications is the fabrication of high-reflection mirrors for high-power lasers. High-power lasers also require mirrors with high laser induced damage threshold (LIDT). In this research, firstly, considering the principles of simulation, we have tried to design two types of mirrors, all-dielectric and metal-dielectric. Therefore, they are suitable in terms of both the reflectance spectrum and LIDT at 10.6 μm. To simulate and fabricate these two types of mirrors, ZnSe and Ge have been used as substrates and for thin film layers, Ge and ZnS have been used. In metal-dielectric mirrors, gold layers have also been used on the substrate as the metal layers. After design and simulation, the process of mirrors' fabrication was done by electron beam evaporation technique and the reflectance spectrum of the samples was taken, which shows the reflectance of all-dielectric mirrors is more than 99% and that of Metal-dielectric mirrors is more than 99.9%. Finally, measuring the LIDT of these two types of mirrors was performed based on ISO21254-1 2011 standard which shows that the metal-dielectric mirror with ZnSe substrate is the most suitable mirror for continuous lasers at 10.6 μm.

薄膜在光学和光子学领域有许多应用。这些应用之一是用于高功率激光器的高反射镜的制造。高功率激光器还需要具有高激光诱导损伤阈值（LIDT）的反射镜。在这项研究中，首先，考虑到模拟原理，我们尝试设计两种类型的反射镜，全介电镜和金属介电镜。因此，就反射光谱和10.6μm的LIDT而言，它们都是合适的。为了模拟和制造这两种类型的反射镜，将ZnSe和Ge用作衬底，并针对薄膜层使用了Ge和ZnS。在金属介电镜中，金层也已经在基板上用作金属层。经过设计和仿真，镜子的过程 用电子束蒸发技术进行了制备，并得到了样品的反射光谱，表明全介电镜的反射率大于99％，金属介电镜的反射率大于99.9％。最后，根据ISO21254-1 2011标准对这两种类型的反射镜的LIDT进行了测量，结果表明带有ZnSe衬底的金属电介质反射镜是最适合10.6μm连续激光的反射镜。